Short Summary
Lam Research has filed an IPR petition challenging all 20 claims of Inpria's EUV lithography patent, asserting obviousness over multiple prior‑art references and indefiniteness issues. The petition seeks institution and cancellation of the claims.
Detailed Summary
Lam Research Corp. petitioned the PTAB for inter‑partes review of U.S. Patent No. 11,537,048, which claims organotin‑based photoresist structures for extreme ultraviolet (EUV) lithography. The petitioner argues that claims 1‑20 are obvious in view of prior‑art references Dhas, Cardineau, Weidman, and Molloy, and that several means‑plus‑function terms lack definite structure under §112(6). Additional arguments include improper priority dating due to new matter added after filing and that discretionary denial under §§325(d) and 314(a) is unwarranted. The petition requests that the Board institute the trial and cancel all challenged claims.
Practitioner Note
This case demonstrates the evidentiary and procedural standards applied in patent matters before local courts. Understanding the court's reasoning in Lam Research Corp. vs Inpria Corporation is valuable context for structuring arguments or assessing risk in similar proceedings.
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